Journal
Scientific and Technical Journal of Information Technologies, Mechanics and Optics
UDK621.3.049.7
Issue:3 (161)
Download PDF0 Kbyte
Design of the microelectromechanical logic element based on a comb-drive resonator
Annotation
CMOS technology has nearly reached the physical limits of transistor scaling and exhibits significant operational limitations at extreme temperatures and ionizing radiation. This work proposes a methodology for designing logic elements based on an alternative technology utilizing comb-drive microelectromechanical resonators operating on a non-contact principle and reconfigurable during operation. A method is proposed for calculating the geometric parameters of the device using analytical expressions and considering technological norms necessary to achieve specified characteristics: the natural frequency of resonator oscillations (100 kHz) and the quality factor (20) at atmospheric pressure. Optimal geometric parameters of the device, characteristics of capacitive cells affecting the sensitivity of the device and the quality factor, taking into account air damping, are determined. The accuracy of the calculations is sufficient for designing photomasks without using specialized software. A compact model of a logic microelectromechanical element has been developed, allowing for system analysis of dynamic characteristics and implementation of a functionally complete set of logic operations. The developed design flow can be applied to create logic microelectromechanical elements with the possibility of reprogramming during operation and further cascading of such devices for constructing complex digital circuits. The article is useful for developers of microelectromechanical accelerometers and gyroscopes and proposes an alternative approach to creating three-dimensional models based on a library of parametric components and generating compact models for system analysis.
Keywords
Постоянный URL
Articles in current issue
- Explainability and interpretability are important aspects in ensuring the security of decisions made by intelligent systems (review article)
- Intensification of sol-gel synthesis of Mn-containing MgO-Al2O3-ZrO2-SiO2 system materials
- Conformational properties of polymer brushes with aggrecan-like macromolecules under strong stretching conditions on a cubic lattice
- Atmospheric air-phase singlet oxygen generator for practical multifunctional applications
- Two-stage algorithm for underwater image recovery for marine exploration
- Analysis of the cryptographic strength of the SHA-256 hash function using the SAT approach
- Investigation of the possibility of using evolutionary algorithms for conditional generation of attributed graphs
- Analysis of the applicability of existing secret separation schemes in the post-quaternary era
- Deep learning-enhanced contour interpolation techniques for 3D carotid vessel wall segmentation
- Detecting fraud activities in financial transactions using SMOTENN model
- A deep learning approach for adaptive electrocardiogram-based authentication in an internet of things enabled telehealth system
- Method for identifying the active module in biological graphs with multi-component vertex weights
- Modeling of nonlocal porous functionally graded nanobeams under moving loads
- Critical loads of antisymmetric and mixed forms of buckling of a CCCC-nanoplate under biaxial compression
- On the properties of compromise M-estimators optimizing weighted L2-norm of the influence function
- Combined approach to fault detection in complex technical systems based on bond-graph model
- Feature extraction methods for metagenome de Bruijn graphs collections based on samples classification information
- Automatic calibration of the receiving line of information and control systems in real time
- Model for storing spatial data of tensor geophysical fields
- Boundary estimation of the reliability of cluster systems based on the decomposition of the Markov model with limited recovery of nodes with accumulated failures